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Modelling of microfabrication systems /
by Nassar, Raja.
Publication:
Berlin : Springer, 2003
. x, 269 p. :
24 cm.
Date:2003
Availability:
Copies available:
AUM Main Library
(3),
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Micromechanical photonics /
by Ukita, H.
Publication:
Berlin : Springer-Verlag, 2006
. xi, 250 p. :
25 cm.
Date:2006
Availability:
Copies available:
AUM Main Library
(1),
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Micromechanics and nanoscale effects : , MEMS, multi-scale materials and micro-flows /
Publication:
Dordrecht : Kluwer Academic, 2004
. xv, 240 p. :
25 cm.
Date:2004
Availability:
Copies available:
AUM Main Library
(1),
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